Atomic-Layer Downstream Etching Equipment for semiconductors Innovative plasma sources Unique process solutions

Equipment for semiconductors

We are a supplier of plasma-processing solutions for the production of integrated circuits used by smartphones and tablets

Read more

Innovative plasma sources

1000 times higher chemical concentration

Read more

Unique process solutions

Infinite etching selectivity with ALDE®
Unparalleled cleaning efficiency with HDRF®

Read more

New video: ALDE®

Discover our animation about our atomic-layer downstream etching technology.

Watch video

Industry News

March 16, 2015
FD-SOI at Samsung [SemiWiki]

March 12, 2015
China’s semiconductor investment plans focus of SEMICON China 2015 [Solid State Technology ]

March 6, 2015
ST, CMP team up to develop prototyping platform for power ICs [eMedia India]

March 4, 2015
ST's next-gen optical MEMS capability called Lab4MEMS II [Electronics Engineering Herald ]

March 2, 2015
Sony Endorse FD-SOI to Attack Wearable & IoT [ ]

Read more

Latest News and Releases

March 9, 2015
Nanoplas will be exhibiting at SEMICON China 2015. Please see us at booth #W4-4519

March 9, 2015
Nanoplas today announces the sale of the first DSB6000 system to pioneer in micro-LED display technology

December 8, 2014
Nanoplas announces shipment of one DSB6000 tool to a major defense industry pure player company for special MEMS R&D development

November 24, 2014
Nanoplas announces shipment of one ALDE-300 Process Module to a top-10 largest semiconductor equipment supplier in Asia. Application targets dielectric dry-etching for 10nm FinFET devices

Read more


Follow Us