Atomic-Layer Downstream Etching Equipment for semiconductors Innovative plasma sources Unique process solutions

Equipment for semiconductors

We are a supplier of plasma-processing solutions for the production of integrated circuits used by smartphones and tablets

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Innovative plasma sources

1000 times higher chemical concentration

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Unique process solutions

Infinite etching selectivity with ALDE®
Unparalleled cleaning efficiency with HDRF®

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New video: ALDE®

Discover our animation about our atomic-layer downstream etching technology.

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Industry News

March 16, 2015
FD-SOI at Samsung [SemiWiki]

March 12, 2015
China’s semiconductor investment plans focus of SEMICON China 2015 [Solid State Technology ]

March 6, 2015
ST, CMP team up to develop prototyping platform for power ICs [eMedia India]

March 4, 2015
ST's next-gen optical MEMS capability called Lab4MEMS II [Electronics Engineering Herald ]

March 2, 2015
Sony Endorse FD-SOI to Attack Wearable & IoT [SemiWiki.com ]

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Latest News and Releases

March 9, 2015
Nanoplas will be exhibiting at SEMICON China 2015. Please see us at booth #W4-4519

March 9, 2015
Nanoplas today announces the sale of the first DSB6000 system to pioneer in micro-LED display technology

December 8, 2014
Nanoplas announces shipment of one DSB6000 tool to a major defense industry pure player company for special MEMS R&D development

November 24, 2014
Nanoplas announces shipment of one ALDE-300 Process Module to a top-10 largest semiconductor equipment supplier in Asia. Application targets dielectric dry-etching for 10nm FinFET devices

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