What we do

Equipment for semiconductors

We are a supplier of plasma-processing solutions for the production of integrated circuits used by smartphones and tablets

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How we do it

Innovative plasma sources

1000 times higher chemical concentration

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Benefits

Unique process solutions

Infinite etching selectivity with ALDE®
Unparalleled cleaning efficiency with HDRF®

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Industry News

May 7, 2013
450mm and EUV: Critical Challenges Facing the Semiconductor Industry [Semi]

May 1, 2013
IBM Research makes world’s smallest movie using atoms [Solid State Technology]

May 1, 2013
450mm in 2017: It's coming [Solid State Technology]

May 1, 2013
GlobalFoundries 2.5 / 3D at 20nm [Solid State Technology]

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Latest News and Releases

HOT NEWS | PRESS RELEASE | March 14, 2013
Nanoplas announces revolutionary dry-etching technology enabling unlimited selectivity at 20nm node and beyond

IN THE NEWS | March 20, 2013
Dry Etch Edges Wet [EE Journal]

January 21, 2013
Nanoplas opens new technology center in Saint Égrève, France, near Grenoble; facility’s cleanroom is dedicated to customers’ process development and characterization

September 20, 2012
Nanoplas announces multi-million-dollar funding from French Ministry of Industry for developing CMOS and 3D-IC etching and cleaning processes

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